High capacitance density vertical natural capacitors

ABSTRACT

Disclosed are embodiments of a method of forming a capacitor with inter-digitated vertical plates such that the effective gap distance between plates is reduced. This gap width reduction significantly increases the capacitance density of the capacitor. Gap width reduction is accomplished during back end of the line processing by masking connecting points with nodes, by etching the dielectric material from between the vertical plates and by etching a sacrificial material from below the vertical plates. Etching of the dielectric material forms air gaps and various techniques can be used to cause the plates to collapse in on these air gaps, once the sacrificial material is removed. Any remaining air gaps can be filled by depositing a second dielectric material (e.g., a high k dielectric), which will further increase the capacitance density and will encapsulate the capacitor in order to make the reduced distance between the vertical plates permanent.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a Division of U.S. application Ser. No. 11/422,457 filed Jun. 6, 2006 and issued as U.S. Pat. No. 7,466,534 on Dec. 16, 2008, the complete disclosure of which, in its entirety, is herein incorporated by reference.

BACKGROUND

1. Field of the Invention

The embodiments of the invention generally relate to vertical natural capacitors, and, more particularly, to a vertical natural capacitor with high capacitance density and a method of forming the capacitor.

2. Description of the Related Art

Vertical natural capacitors are currently used as capacitor devices in most of the logic and analog semiconductor technologies. As technology scaling continues, the capacitance density for such capacitors is expected to increase. However, due to the introduction of low dielectric constant material (e.g., ultra low k (i.e., k<2.2)) porous material) as the inter-level dielectric, the capacitance density increase of the vertical natural capacitance is expected to drop. It would be advantageous over the prior art to provide a method of forming a vertical natural capacitor that allows for the incorporation of a low dielectric constant material as the inter-level dielectric and still allows for device scaling accompanied by increased capacitance density.

SUMMARY

In view of the foregoing, disclosed are embodiments of a capacitor with inter-digitated vertical plates and a method of forming the capacitor such that the effective gap distance between plates is reduced (i.e., the ratio of the gap width to the plate width ranges between approximately 1:5 and 1:10). This gap width reduction significantly increases the capacitance density of the capacitor. Gap width reduction is accomplished during back end of the line processing by etching the dielectric material from between the vertical plates and by etching a sacrificial material from below the vertical plates. Etching of the dielectric material from between the plates forms air gaps and various techniques can be used to cause the plates to collapse in on these air gaps, once the sacrificial material is removed. Any remaining air gaps can be filled by depositing a second dielectric material (e.g., a high k dielectric), which will further increase the capacitance density and will encapsulate the capacitor in order to make the reduced distance between the vertical plates permanent.

More particularly, disclosed herein are embodiments of a vertical natural capacitor structure. The structure can comprise two parallel nodes with opposite polarity on a substrate (i.e., a first node with a first polarity (e.g., positive) and a second node with a second polarity (e.g., negative). These nodes form the terminals of the capacitor.

The structure also comprises a plurality of conductive plates that extend vertically from the substrate and are positioned between the two nodes. These conductive plates are alternately electrically connected to either the first node or the second node at connecting points. For example, first conductive plates can be electrically connected at one end to the first node and positioned adjacent to second conductive plates that are electrically connected at an opposite end to the second node. Each of the conductive plates further comprises a main body that is approximately planar, approximately parallel to the main body of any adjacent conductive plates and approximately perpendicular to the first and second nodes.

Additionally, a first spacing between the connecting points of any adjacent conductive plates is greater than a second spacing between the main bodies of any adjacent plates, as measured along the same axis parallel to the nodes. More specifically, at least some of the conductive plates extend outward at an angle from that node to which they are connected and comprise a curve that is angled towards the opposite node. The angle may vary from plate to plate so that the spacing between the main bodies of adjacent plates is reduced.

Furthermore, each of the conductive plates can be inter-digitated. Specifically, each plate can comprise a horizontal electrode on each of a plurality of metal levels. Thus, each metal level comprises a plurality of horizontal first conductive electrodes and a plurality of horizontal second conductive electrodes. The first and second conductive electrodes on each metal level are separated and alternately connected to the first and second nodes, respectively. Thus, each first conductive electrode has a first polarity and each second conductive electrode has a second polarity.

Each horizontal conductive electrode on each metal level is aligned in a stack with a corresponding electrode in the adjacent metal levels. The aligned horizontal electrodes are separated by an inter-level dielectric material (i.e., a first dielectric material). This dielectric material can, for example, comprise a low dielectric constant (i.e., k<3.9) or even an ultra low k (i.e., k<2.2) material. Each aligned horizontal electrode in a stack is further connected to the adjacent electrodes above and below by vias within the inter-level dielectric. Thus, the stacked electrodes form a parallel array of inter-digitated vertical plates that have alternating polarity and are separated by spaces.

The spaces between the conductive plates can be filled with a second dielectric material that is the same or different from the inter-level dielectric material. For example, this second dielectric material can comprise a high k dielectric material, where (i.e., k>5.0). This second dielectric material can further encapsulate the conductive plates so that the relative spacing between the plates is maintained.

The structure can also be formed such that in addition to the dielectric fill material that is deposited and encapsulates the plates, the spaces can be filled by a stressed nitride film or sidewalls spacers that optionally line the opposing sidewalls of each conductive plate. Furthermore, the film or sidewall spacer on one side of each plate can be thicker than the film or sidewall spacer on the other side.

Lastly, the width of the conductive plates as well as the spacing between adjacent conductive plates at the connecting points (i.e., first spacing), described above, are predetermined based upon current processing techniques for inter-digitated vertical conductive plates. For example, the width of the plates is typically 120-200 nm and the first spacing is typically 80-160 nm). By using the formation method, described below, the second spacing between the main bodies of adjacent conductive plates can be reduced from 80-160 nm to approximately 20 nm. Thus, the structure can be formed such that the width of the conductive plates is approximately 5-10 times greater than spacing between the main bodies of adjacent plates.

Thus, the ratio of the spacing between the main bodies of the conductive plates (i.e., the second spacing) to the width of the plates ranges between approximately 1:5 and 1:10). Consequently, the capacitance density of the capacitor can, depending upon the type of dielectric material used, range from approximately 5-20 fF/μm².

Also, disclosed herein are embodiments of a method of forming the vertical natural capacitor structure, described above. The method comprises forming, above a substrate, a layer comprising a first sacrificial portion and two second portions on opposing sides of the first portion. Then, parallel first and second nodes, that will form the terminals for the capacitor, are formed above the second portions of this layer. As these nodes are formed, multiple vertical conductive plates are also simultaneously formed.

For example, inter-digitated vertical conductive plates can be formed using conventional processing techniques. That is, multiple parallel horizontal electrodes are patterned into successive metal levels such that the horizontal electrodes are aligned, separated by an inter-level dielectric material (e.g., a low k dielectric material (i.e., k<3.9) or an ultra-low k dielectric material (i.e., k<2.2)), and connected by vias.

These conductive plates are formed above the first sacrificial portion of the layer such that the conductive plates are alternately connected at connecting points to either the first node or the second node and such that they are separated by spaces that are filled with a dielectric material.

The conductive plates can further be formed such that they are planar and are perpendicular with respect to both nodes. Alternatively, the conductive plates can be formed with a bend so that they extend outward at an angle from the node to which they are connected and also extend at a desired angle (e.g., perpendicular) to the opposite node. That is, both first and second conductive plates can be simultaneously formed above the sacrificial portion. The first conductive plates can be formed so that they are connected to the first node, so that they extend at a first angle from the first node and so that they comprise a first bend allowing them to further extend perpendicular to the second node. Similarly, second conductive plates can be formed so that they are connected to the second node, so that they extend at a second angle from the second node and so that they comprise a second bend allowing them to further extend perpendicular towards the first node and parallel to the first conductive plates.

Once the plates are formed, the plates remain connected at the connecting points to the nodes, but the size of the spaces between the plates is reduced such that a first spacing between the connecting points of adjacent conductive plates is greater than a second spacing between the main bodies of the adjacent conductive plates.

In order to reduce the size of the spaces, after the conductive plates are formed, the dielectric material from the spaces and as well as the sacrificial portion of the layer below the conductive plates are etched out in separate processes. These etching processes are performed in order to form air gaps in the spaces between the conductive plates and to ensure that the conductive plates are supported only at the connecting points.

As a result of the etching processes, the conductive plates remain connected at the connecting points, but collapse in on the air gaps, thereby, reducing the size of the spaces between the main bodies of the conductive plates. Various alternative techniques may be used to ensure the collapse of the plates. For example, following both etch processes, a wet rinse and dry process can be performed. The surface tension resulting from the rinse causes the conductive plates to collapse in on the air gaps.

Alternatively, after the dielectric material is etched from between the spaces, but before the sacrificial portion is etched, a stressed nitride layer can be deposited at an angle onto the conductive plates such that on each of the conductive plates the stressed nitride layer is thicker on one side. Once the sacrificial portion is released, the thicker stressed nitride on one side causes the conductive plates to collapse in on the air gaps.

Similarly, after the dielectric material is etched from between the spaces, but before the sacrificial portion is etched, sidewall spacers can be formed on the conductive plates and a directional etch process can be performed so that one sidewall spacer is thicker than another sidewall spacer on each of the conductive plates. Once the sacrificial portion is released, the thicker sidewall spacers on one side cause the conductive plates to collapse in on the air gaps.

While the formation of bended plates is optional, such bended plates provide torque to further enhance the collapsing process.

After the size of the spaces has been reduced, another dielectric material (i.e., a second dielectric material) can be deposited over the conductive plates in order to fill any space left between the conductive plates and to encapsulate the conductive plates to ensure that the reduced spacing between the main bodies of adjacent plates is maintained. This second dielectric material can comprise the same or a different dielectric material than the first dielectric material (e.g., the second dielectric material can be a high k dielectric (i.e., k>5.0).

These and other aspects of the embodiments of the invention will be better appreciated and understood when considered in conjunction with the following description and the accompanying drawings. It should be understood, however, that the following descriptions, while indicating embodiments of the invention and numerous specific details thereof, are given by way of illustration and not of limitation. Many changes and modifications may be made within the scope of the embodiments of the invention without departing from the spirit thereof, and the embodiments of the invention include all such modifications.

BRIEF DESCRIPTION OF THE DRAWINGS

The embodiments of the invention will be better understood from the following detailed description with reference to the drawings, in which:

FIG. 1 is a top view diagram illustrating a vertical natural capacitor 100;

FIG. 2 is a cross-sectional view (A-A′) diagram of the capacitor of FIG. 1;

FIG. 3 is a top view diagram illustrating an embodiment of the vertical natural capacitor 300;

FIG. 4 is a cross-section (A-A′) of the capacitor 300 of FIG. 3;

FIG. 5 is an alternative cross-section (A-A′) of the capacitor 300 of FIG. 3;

FIG. 6 is another alternative cross-section (A-A′) of the capacitor 300 of FIG. 3;

FIG. 7 is a flow diagram illustrating embodiments of the method of forming the capacitor structure 300 of FIG. 3;

FIG. 8 is a cross-section (B-B′) of a partially completed capacitor 300 of FIG. 3;

FIG. 9 is a cross-section (B-B′) of a partially completed capacitor 300 of FIG. 3;

FIG. 10 is a cross-section (B-B′) of a partially completed capacitor 300 of FIG. 3;

FIG. 11 a is a top view diagram of an exemplary partially completed capacitor 300 of FIG. 3;

FIG. 11 b is a top view diagram of an exemplary partially completed capacitor 300 of FIG. 3;

FIG. 12 is a cross-section (B-B′) of a partially completed capacitor 300 of FIG. 3;

FIG. 13 is a top view diagram of an exemplary partially completed capacitor 300 of FIG. 3;

FIG. 14 is a cross-section (B-B′) of a partially completed capacitor 300 of FIG. 3;

FIG. 15 is a top view diagram of an exemplary partially completed capacitor 300 of FIG. 3; and

FIG. 16 is a cross-section (B-B′) of a partially completed capacitor 300 of FIG. 3.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

The embodiments of the invention and the various features and advantageous details thereof are explained more fully with reference to the non-limiting embodiments that are illustrated in the accompanying drawings and detailed in the following description. It should be noted that the features illustrated in the drawings are not necessarily drawn to scale. Descriptions of well-known components and processing techniques are omitted so as to not unnecessarily obscure the embodiments of the invention. The examples used herein are intended merely to facilitate an understanding of ways in which the embodiments of the invention may be practiced and to further enable those of skill in the art to practice the embodiments of the invention. Accordingly, the examples should not be construed as limiting the scope of the embodiments of the invention.

As mentioned above, vertical natural capacitors are currently used as capacitor devices in most of the logic and analog semiconductor technologies. Referring to the top view and cross-section diagrams of FIGS. 1 and 2 in combination, such vertical natural capacitors 100 comprise multiple metal levels (e.g., M1-Mx) separated by an inter-level porous dielectric material 150 with a low dielectric constant (i.e., k<3.9) or ultra low dielectric constant (i.e., k<2.2)). Each metal level M1-Mx comprises a plurality of horizontal first conductive electrodes and a plurality of horizontal second conductive electrodes. Additionally, each horizontal conductive electrode 111 a-b and 121 a-b is aligned in a stack with the corresponding electrode 111 a-b and 121 a-b in the adjacent metal level M1-Mx and connected by vias 112 a-b and 122 a-b, respectively. The stacked horizontal electrodes 111 a-b and 121 a-b form a parallel array of inter-digitated alternating first vertical conductive plates 110 a-b and second vertical conductive plates 120 a-b. The first electrical plates 110 a-b are connected to a first common node 113 (i.e., a first capacitor terminal) and have a first polarity and the second plates 120 a-b are connected to an opposing second common node 123 (i.e., a second capacitor terminal) and have a second polarity.

As technology scaling continues, the capacitance density for such vertical natural capacitors is expected to increase because the vertical plates are expected to be positioned closer and closer. However, due to the introduction of low dielectric constant material (e.g., ultra low k (i.e., k<2.2)) porous material) as the inter-level dielectric, the capacitance density increase of the vertical natural capacitance is expected to drop because the lower the dielectric constant the lower the capacitance and the processing technology for such dialects limits the minimum spacing 160 that can be achieved between the vertical plates 110 and 120. Specifically, with current processing techniques, the minimum width 161 achievable for the horizontal electrodes 111 a-b, 121 a-b ranges between approximately 120 nm and 200 nm and the minimum spacing 160 between these electrodes ranges between approximately 80 nm and 160 nm. With such dimensions and if a low k inter-dielectric material is used, the capacitance density will range between approximately 1.0 to 1.4 fF/μm².

It would be advantageous over the prior art to provide a high capacitance density vertical natural capacitor and a method of forming such a vertical natural capacitor that allows for the incorporation of an inter-level dielectric material with a low or ultra low dielectric constant and still allows for device scaling accompanied by increased capacitance density.

Therefore, disclosed are embodiments of a capacitor with inter-digitated vertical plates and a method of forming the capacitor such that the effective gap distance between plates is reduced. This gap width reduction significantly increases the capacitance density of the capacitor. Gap width reduction is accomplished during back end of the line processing by etching the dielectric material from between the vertical plates and by etching a sacrificial material from below the vertical plates. Etching of the dielectric material from between the plates forms air gaps and various techniques can be used to cause the plates to collapse in on these air gaps, once the sacrificial material is removed. Any remaining air gaps can be filled by depositing a second dielectric material (e.g., a high k dielectric), which will further increase the capacitance density and will encapsulate the capacitor in order to make the reduced distance between the vertical plates permanent.

More particularly, referring to FIG. 3, disclosed herein are embodiments of a vertical natural capacitor structure 300. FIGS. 4-6 are cross-sections A-A′ of FIG. 3 and illustrate additional features which may alternatively be incorporated into the embodiment of FIG. 3.

Referring to FIG. 3, the capacitor structure 300, can comprise two parallel nodes 313, 323 with opposite polarity on a substrate (i.e., a first node 313 with a first polarity (e.g., positive) and a second node 323 with a second polarity (e.g., negative)). These nodes 313, 323 form the terminals of the capacitor.

The structure 300 also comprises a plurality of vertical conductive plates 310 a-b, 320 a-b that are separated by spaces 365. Although, as illustrated in FIGS. 3-6, the capacitor comprises four plates, it is anticipated that the capacitor 300 of the invention may comprise more or less plates. The plates 310 a-b, 320 a-b are positioned above the substrate and extend between the two nodes 313, 323.

More particularly, the plates 310 a-b, 320 a-b can extend vertically from the substrate 301. The plates 310 a-b, 320 a-b can be alternately electrically connected to either the first node 313 or the second node 323 at connecting points 316 a-b, 326 a-b. For example, first conductive plates 310 a-b can be electrically connected at one end (see connecting points 316 a-b) to the first node 313 and positioned adjacent to second conductive plates 320 a-b that are electrically connected at an opposite end (see connecting points 326 a-b) to the second node 323. Each of the conductive plates 310 a-b, 320 a-b further comprises a main body 318 a-b, 328 a-b that is approximately planar, approximately parallel to the main body of any adjacent conductive plates and approximately perpendicular to the first and second nodes 313, 323.

Additionally, a first spacing 363 between the connecting points of any adjacent conductive plates (e.g., between connecting point 326 b of plate 320 b and connecting point 316 b of plate 310 b) is greater than a second spacing between the main bodies of any adjacent plates (e.g., between plate 320 b and plate 310 b). More specifically, at least some of the conductive plates extend outward at an angle from that node to which they are connected and comprise a curve that is angled towards the opposite node. The angle varies from plate to plate so that the spacing between the main bodies 318 a-b, 328 a-b of adjacent plates is reduced.

For example, referring to FIG. 3, the first conductive plates 310 a-b extend outward from the first node 313 at different first angles 314 a-b and comprise first curves 315 a-b that are angled toward the second node 323. The main bodies 318 a-b of the first conductive plates 310 a-b extend from the first curves 315 a-b towards the second node 323. Similarly, the second conductive plates 320 a-b extend outward from the second node at different second angles 324 a-b and comprise second curves 325 a-b that are angled towards the first node 313. The main bodies 328 a-b of the second conductive plates 320 a-b extend from the second curves 325 a-b towards the first node 313. Thus, the main bodies of the first and second conductive plates 310 a-b, 320 a-b are approximately parallel and perpendicular to the nodes 313, 323.

Referring to FIG. 4, the conductive plates 310 a-b, 320 a-b can be inter-digitated. Specifically, each plate 310 a-b, 320 a-b can comprise a horizontal electrode (e.g., 311 a-b, 321 a-b) on each of a plurality of metal levels (e.g., M1-Mx). Thus, each metal level M1-Mx comprises a plurality of horizontal first conductive electrodes 311 a-b and a plurality of horizontal second conductive electrodes 321 a-b. The first and second conductive electrodes 311 a-b, 321 a-b on each metal level M1-Mx are separated and alternately connected to the first and second nodes 313, 323, respectively (see FIGS. 3 and 4). Thus, each first conductive electrode 311 a-b has a first polarity (e.g., is a positive electrode) and each second conductive electrode 321 a-b has a second polarity (e.g., is a negative electrode).

Additionally, each horizontal conductive electrode on each metal level is aligned in a stack with a corresponding electrode in the adjacent metal levels. The aligned horizontal electrodes are separated by an inter-level dielectric material 350 (i.e., a first dielectric material). This first dielectric material can, for example, comprise a low dielectric constant (i.e., k<3.9) or even an ultra low k (i.e., k<2.2) material. Each aligned horizontal electrode in a stack is further connected to the adjacent electrodes above and below by vias 312 a-b, 322 a-b within the inter-level dielectric 350. Thus, the stacked electrodes form a parallel array of inter-digitated vertical plates that have alternating polarity and are separated by spaces 365.

The spaces 365 between the conductive plates 310 a-b, 320 a-b can be filled with a dielectric material 351 (i.e., a second dielectric material) that is the same or different from the inter-level dielectric material. For example, this second dielectric material can comprise a high k dielectric material (i.e., k>5.0). This second dielectric material 351 can further encapsulate the conductive plates 310 a-b, 320 a-b so that the relative spacing between the plates is maintained.

The structure 300 can also be formed so that in addition to the dielectric fill material 351 that is deposited and encapsulates the plates 310 a-b, 320 a-b, the spaces 365 can be filled by a stressed nitride film 590 (as illustrated in FIG. 5) or sidewalls spacers 690 (as illustrated in FIG. 6) that optionally line the opposing sidewalls of each conductive plate. Furthermore, the film 590 or sidewall spacer 690 can be thicker on one side 591, 691 of each plate than the other side 592, 692.

Although the illustrations of FIGS. 5 and 6 show the thicker film layer/sidewall spacers on the same side of each plate, it is anticipated that for half of the conductive plates (e.g., plates 310 a and 320 a) the thicker stressed film layer/sidewall spacer could be positioned on one side and for the other half of the conductive plates (e.g., plates 310 b and 320 b) the thicker stressed film layer/sidewall spacer could be positioned on the opposite side. During formation, discussed below, the thicker stressed film layer/sidewall spacer causes the conductive plates to collapse in on air gaps between the plates and, thereby, reduces the spacing (i.e., the second spacing) between the main bodies 318 a-b, 328 a-b of the conductive plates 310 a-b, 320 a-b. If the thicker stressed film layer/sidewall spacer is on the same side of all of the plates, the plates will tend to collapse towards one end of the structure. If the plates on half of the structure have the thicker stressed film/sidewall spacer on one side and the plates on the other half of the structure have the thicker stressed film/sidewall spacer on the opposite side, the collapse of the plates can be directed towards the center.

Lastly, the conductive plates 310 a-b, 320 a-b, described above, have a predetermined width 361. This predetermined width 361 as well as the first spacing 363 between the connecting points of adjacent conductive plates, discussed above, are determined based on processing techniques used to form inter-digitated vertical conductive plates. For example, using the conventional processing techniques, discussed above, the first width typically ranges between approximately 120 nm and 200 nm and the spacing between the connecting points of adjacent conductive plates typically ranges between 80 nm and 160 nm.

By using the formation method of the invention, described below, the second spacing 362 between the main bodies 318 a-b, 328 a-b of adjacent conductive plates can be reduced from 80-160 nm to approximately 20 nm. Thus, the structure 300 can be formed such that the width 361 of the conductive plates (e.g., 120-200 nm) is approximately 5-10 times greater than the spacing 362 (e.g., 20 nm) between the main bodies 318 a-b, 328 a-b of adjacent plates.

Consequently, the capacitance density is scalable and can, depending upon the type of dielectric material 350, 351 used (greater k results in higher capacitance density), range from approximately 5-20 fF/μm². Thus, the capacitance density achievable with the structure 300 is significantly greater than the capacitance density of approximately 1.0 to 1.4 fF/μm² achievable with prior art vertical natural capacitor structures.

Referring to FIG. 7, also disclosed herein are embodiments of a method of forming the vertical natural capacitor structure 300 of FIG. 3, described above. The embodiments of the method begin by forming a dielectric layer 302 (e.g., SiO₂) on a substrate 301 (see FIG. 8). The dielectric layer 302 is etched with a pattern corresponding to horizontal electrodes and nodes for the vertical capacitor. Then, a metal 303 (e.g., copper (Cu)) is deposited and planarized (see FIG. 9). One or more additional protective dielectric layers can be deposited above the metal layer 303.

Then, a layer 305 comprising a first sacrificial portion 304 and two second portions 314 on opposing sides of the first portion 304 can be formed (702, see FIG. 10). This process 702 can be accomplished by depositing, patterning and etching a sacrificial layer (e.g., SiLK™ by the Dow Chemical Company). Then, inter-level dielectric material 350 (e.g., a low k dielectric material (i.e., k<3.9 or an ultra-low k dielectric material (i.e., k<2.2)) can then be deposited over the remaining portion of the sacrificial layer and planarized level with the sacrificial layer, thereby, forming the layer 305 with the first sacrificial portion 304 bordered by second portions 314. Alternatively, this process 702 can be accomplished by depositing an inter-level dielectric material 350. The inter-level dielectric 350 can then be patterned and etched with a cavity. A sacrificial layer (e.g., SiLK™ of the Dow Chemical Company) can be deposited into the cavity and planarized level with the inter-level dielectric 350, thereby, forming the layer 305 with the first sacrificial portion 304 bordered by second portions 314.

After the formation of layer 305, standard wiring levels are used to fabricate the capacitor 300. Referring to FIGS. 10 and 11 a or 11 b in combination, inter-digitated vertical conductive plates 310 a-b, 320 a-b and terminal nodes 313, 323 are simultaneously formed above the first 304 and second portions 314, respectively, of layer 305, using conventional processing techniques (e.g., a dual-damascene scheme or as described in U.S. Pat. No. 6,822,312 issued to Sowlati et al. on Nov. 23, 2004 and incorporated herein by reference) (704-706). As mentioned above, by using such conventional processing techniques, plates 310 a-b, 320 a-b that have a width of approximately 120-200 nm and that are separated by a spaces that are approximately 80-160 nm can be formed.

Specifically, each plate 310 a-b, 320 a-b can be formed to have a horizontal electrode (e.g., 311 a-b, 321 a-b) in each of a plurality of successive metal levels (e.g., M1-Mx) (708). Thus, each metal level M1-Mx can be formed to comprise a plurality of horizontal first conductive electrodes 311 a-b and a plurality of horizontal second conductive electrodes 321 a-b. These horizontal electrodes 311 a-b, 321 a-b can be patterned such that they are separated by spaces 365 having, for example, a width 360 (e.g., a minimum width achievable using lithographic techniques). The first and second conductive electrodes 311 a-b, 321 a-b on each metal level M1-Mx can further be patterned such that they are alternately connected at to the first and second nodes 313, 323 at connecting points 316 a-b, 326 a-b. Thus, each first conductive electrode 311 a-b will have a first polarity (e.g., is a positive electrode) and each second conductive electrode 321 a-b will have a second polarity (e.g., is a negative electrode).

Additionally, each horizontal conductive electrode in each metal level M1-Mx can be patterned so that they are aligned (710) in a stack with a corresponding electrode in the adjacent metal level M1-Mx. The horizontal electrodes on and between each metal level are separated during processing by multiple depositions of an inter-level dielectric material 350 (i.e., a first dielectric material) (712). This first dielectric material can, for example, comprise a low dielectric constant (i.e., k<3.9) or even an ultra low k (i.e., k<2.2) material. However, each aligned horizontal electrode in a stack is further connected to the adjacent horizontal electrodes above and below by the formation of vias within the inter-level dielectric 350 (714). Thus, a parallel array of inter-digitated vertical plates 310 a-b, 320 a-b that are separated by dielectric 350 filled spaces 365 and that have alternating polarity is formed.

Furthermore, these conductive plates can be formed at process 706 planar (see FIG. 11 a) or with optional bends (see FIG. 11 b) (716). Specifically, referring to FIG. 11 a, the plates 310 a-b and 320 a-b can be formed such that they are planar and are perpendicular with respect to both nodes 313 and 323. Alternatively, referring to FIG. 11 b, the conductive plates 310 a-b and 320 a-b can each be formed with a bend so that they extend outward at an angle from the node to which they are connected and also extend at a desired angle (e.g., perpendicular) to the opposite node. For example, the process of forming the conductive plates can comprise simultaneously forming both first and second conductive plates 310 a-b, 320 a-b. The first conductive plates 310 a and b can be formed so that they are connected to the first node 313 at connecting points 316 a-b, so that they extend at an angle from the first node 313 and so that they comprise a first bend (e.g., see bends 1115 a of plate 310 a and 1115 b of plate 310 b) allowing them to further extend perpendicular to the second node 323. Similarly, second conductive plates 320 a and b can be formed so that they are connected to the second node 323 at connecting points 326 a-b, so that they extend at an angle from the second node and so that they comprise a second bend (e.g., see bends 1125 a of plate 320 a and 1125 b of plate 320 b) allowing them to further extend perpendicular towards the first node 313. Thus, for the most part the first conductive plates 310 a-b and the second conductive plates 320 a-b are formed parallel to each other.

Upon completion of 706, a release mask 391 patterned such that the conductive plates 310 a-b, 320 a-b are exposed and the nodes 313, 323 are masked (see FIGS. 13 and 14). Then, the size of the spaces between the plates is reduced (718). Specifically, mask protects the connecting points 316 a-b, 326 a-b such that the plates 310 a-b, 320 a-b remain to the nodes, but the size of the spaces 365 between the plates is reduced such that a first spacing 363 between adjacent connecting points is greater than a second spacing 362 between main bodies of adjacent conductive plates. For example, as illustrated in FIG. 3, the spaces 365 are reduced so that the spacing 361 between connecting points 326 b and 316 b is greater than the spacing 362 between the main body 328 b and the main body 318 b of adjacent plates 320 b and 310 b.

In order to reduce the size of the spaces 365 after the conductive plates are formed, both the dielectric material 350 from the spaces 365 and the sacrificial portion 304 of the layer 305 below the conductive plates 310 a-b, 320 a-b are etched out in separate selective etch processes (720, see FIGS. 15-16). These etching processes are performed in order to form air gaps 355 in the spaces 365 between the conductive plates 310 a-b, 320 a-b. The release mask 391 ensures that the conductive plates 310 a-b, 320 a-b remain connected and supported only at the connecting points 316 a-b, 326 a-b.

As a result of the etching processes (720), the conductive plates 310 a-b, 320 a-b collapse in on the air gaps 355. That is, the main bodies 318 a-b, 328 a-b of the plates 310 a-b, 320 a-b move closer together and, thus, the plates bend near the connecting points. Consequently, the spacing between connecting points of adjacent plates (i.e., the first spacing 363) remains the same (e.g., between 80-160 nm), while the spacing between the main bodies of the conductive plates is significantly reduced (e.g., to approximately 20 nm). Thus, the structure 300 can be formed such that the width 361 of the conductive plates (e.g., 120-200 nm) is approximately 5-10 times greater than the spacing 362 (e.g., 20 nm) between the main bodies 318 a-b, 328 a-b of adjacent plates.

Consequently, the achievable capacitance density using the method described herein, depending upon the type of dielectric material 350, 351 used (greater k results in higher capacitance density), range from approximately 5-20 fF/μm², which is significantly greater than the capacitance density of approximately 1.0 to 1.4 fF/μm² achievable with prior art methods of forming vertical natural capacitors.

After the size of the spaces 365 between the plates has been reduced at process 718, another dielectric material 351 (i.e., a second dielectric material) can be deposited over the conductive plates 310 a-b, 320 a-b in order to fill any air gaps 355 left between the conductive plates and to encapsulate the conductive plates to ensure that the reduced spacing is maintained (730). This second dielectric material 351 can, for example, comprise dielectric material with a high dielectric constant (i.e., k>5.0).

Various alternative techniques may be used to ensure the collapse of the plates at process 720. For example, following both etch processes, a wet rinse (e.g., water rinse, HF rinse, etc.) and dry (e.g., a supercritical CO₂ dry) process can be performed (722). Surface tension resulting from the rinse causes the conductive plates to collapse in on the air gaps (see FIG. 4).

More specifically, referring to FIG. 3, after the rinse, the plates 310 a-b, 320 a-b will remain electrically connected to the first or second nodes 313, 323 at the connecting points 316 a-b, 326 a-b. However, surface tension causes the plates 310 a-b, 320 a-b to move closer together. As the plates move closer together, the portion of each plate adjacent to a node will bend, but the main body 318 a-b, 328 a-b of each plate will remain approximately planar and perpendicular to the opposite node.

Alternatively, after the dielectric material is etched from between the spaces, but before the sacrificial portion is etched, a stressed nitride layer 590 can be deposited at an angle onto the conductive plates such that on each of the conductive plates the stressed nitride layer is thicker on one side (e.g., side 591) (724). Once the sacrificial portion is released, the thicker stressed nitride on one side causes a stress gradient in the conductive plates, thereby, causing them to collapse in on the air gaps (see FIG. 5). Similarly, after the dielectric material is etched from between the spaces, but before the sacrificial portion is etched, sidewall spacers 690 can be formed on the conductive plates and a directional etch process can be performed so that one sidewall spacer is thicker than another sidewall spacer on each of the conductive plates (726). Once the sacrificial portion is released, the thicker sidewall spacers on one side (e.g., side 691) cause the conductive plates to collapse in on the air gaps (see FIG. 6).

More specifically, after the etch processes, the plates 310 a-b, 320 a-b will remain electrically connected to either the first or second nodes 313, 323 at the connecting points 316 a-b, 326 a-b. However, the thicker stress nitride/thicker sidewall spacer causes the main bodies 318 a-b, 328 a-b of the plates 310 a-b, 320 a-b to move closer together. As with the previously described embodiment, as the plates move closer together, the portion of each plate that is adjacent to a node will curve (i.e., bend), but the main body 318 a-b, 328 a-b of each plate will remain approximately planar and perpendicular to the opposite node.

Those skilled in the art will recognize that while it is not necessary to form bended plates at process 716 (see FIG. 11 b), such bends 1115 a-b, 1125 a-b provide additional torque to the plates 310 a-b, 320 a-b once they are released from the dielectric material and the sacrificial portion at process 720. This torque further enhances the collapsing of the plates, regardless of whether the collapse is accomplished using a wet rinse (722), a stressed nitride film (724) or sidewall spacers (726).

Furthermore, although the illustration of the bended plates in FIG. 11 a shows the bends for the first half of the conductive plates (e.g., plates 310 a and 320 a) in the same direction and the bends for the second half of the conductive plates (e.g., plates 310 b and 320 b) in the opposite direction, it is also anticipated that all of the conductive plates could bend in the same direction. More specifically, during process 720 these bends cause torque, which enhances the process 718 that reduces the size of the spaces between the conductive plates. If the plates on one half of the structure are bent in one direction and the plates on the other half of the structure are bent in the opposite direction, the torque can be balanced causing the plates to collapse towards the center. However, if all of the plates are bent in the same direction, the torque from all of the plates is in the same direction such that the plates will tend to collapse more towards one end of the structure.

Similarly, although the illustrations of FIGS. 5 and 6 show the thicker film layer or thicker spacer, respectively, on the same side of each plate, it is also anticipated that for the first half of the conductive plates (e.g., plates 310 a and 320 a) the thicker stressed film layer/sidewall spacer could be positioned on one side and for the second half of the conductive plates (e.g., plates 310 b and 320 b) the thicker stressed film layer/sidewall spacer could be positioned on the opposite side. More specifically, during process 720, the thicker stressed film layer/sidewall spacer on one side can cause the conductive plates to collapse in on the air gaps between the plates and can, thereby, reduce the size of the spaces 365. If the thicker stressed film layer/sidewall spacer is on the same side of all of the plates, the plates will tend to collapse towards one end, as illustrated in FIGS. 5 and 6. However, if the plates on half of the structure have the thicker stressed film/sidewall spacer on one side and the plates on the other half of the structure have the thicker stressed film/sidewall spacer on the opposite side, the collapse of the plates can be directed towards the center.

Additionally, the angle at which each plate extends from a node (i.e., the first and second angles 314 a-b, 324 a-b) will vary from plate to plate, depending upon a number of factors. For example, if during the formation process, the structure is configured so that the plates will collapse towards the center (as discussed above), then center plates will extend outward from the node at a steeper angle than outer plates. Similarly, if during the formation process, the structure is configured so that the plates will tend to collapse towards one end (as discussed above), then the plates at that one end will extend outward from the node at a steeper angle than plates at the opposite end.

Upon completion of the structure 300, further processing can be performed, for example, additional interconnects can be formed to connect the structure to other devices on the wafer.

Therefore, disclosed above, are embodiments of a capacitor with inter-digitated vertical plates and a method of forming the capacitor such that the effective gap distance between the vertical plates is reduced (i.e., the spacing between the main bodies of the conductive plates is reduced). This gap width reduction significantly increases the capacitance density of the capacitor over prior art vertical natural capacitors. This gap width reduction process is accomplished during back end of the line processing by etching the dielectric material from between the vertical plates and by etching a sacrificial material from below the vertical plates. Etching of the dielectric material from between the plates forms air gaps and various techniques can be used to cause the plates to collapse in on these air gaps, once the sacrificial material is removed. Any remaining air gaps can be filled by depositing a second dielectric material (e.g., a high k dielectric), which will further increase the capacitance density and will encapsulate the capacitor. Encapsulation of the capacitor structure ensures that the reduced spacing between the vertical plates is permanent and further protects the device during subsequent processing of the chip circuitry.

The benefits provided by the disclosed vertical natural capacitor are of significant interest to semiconductor device manufacturers. Specifically, due to the increased capacitance density, the capacitor can be used for various applications including, logic and analog/mixed signal applications. More specifically, in logic and radio frequency (RF) circuits, the capacitor can be used for decoupling applications. In addition, the increased capacitance density also allows the chip layout area to be reduced, thereby, reducing the die cost and the chip size.

The foregoing description of the specific embodiments will so fully reveal the general nature of the invention that others can, by applying current knowledge, readily modify and/or adapt for various applications such specific embodiments without departing from the generic concept, and, therefore, such adaptations and modifications should and are intended to be comprehended within the meaning and range of equivalents of the disclosed embodiments. It is to be understood that the phraseology or terminology employed herein is for the purpose of description and not of limitation and that the figures are not drawn to scale. Furthermore, those skilled in the art will recognize that the embodiments of the invention can be practiced with modification within the spirit and scope of the appended claims. 

1. A method of forming a capacitor, said method comprising: forming, above a substrate, a layer comprising a first portion and two second portions on opposite sides of said first portion; forming above said second portions two parallel nodes; forming a plurality of vertical conductive plates above said first portion such that said conductive plates are alternately connected at connecting points to one of said two parallel nodes and such that said conductive plates are separated by spaces that are filled with a dielectric material; and after said forming of said conductivity plates, reducing a size of said spaces such that a first spacing between said connecting points of adjacent conductive plates connected to different ones of said two parallel nodes, as measured along an x-axis, is greater than a second spacing between main bodies of said adjacent conductive plates; further comprising, after said reducing, depositing over said conductive plates a second dielectric material that has a different dielectric constant than said first dielectric material.
 2. The method of claim 1, wherein said reducing comprises: after said forming of said conductive plates, etching said dielectric material from said spaces and etching said first portion from below said conductive plates so that air gaps are formed in said spaces between said conductive plates and so that each of said conductive plates are supported only at said connecting points; and collapsing said conductive plates in on said air gaps.
 3. The method of claim 2, wherein said collapsing comprises at least one of the following: before said etching of said first portion, depositing a stressed nitride layer at an angle onto said conductive plates such that said stressed nitride layer is thicker on one side of said conductive plates; before said etching of said first portion, forming sidewall spacers on said conductive plates and performing a directional etch so that one sidewall spacer is thicker than another sidewall spacer on each of said conductive plates; and after said etching of said first portion, performing a wet rinse and dry process.
 4. The method of claim 1, wherein said dielectric material has a dielectric constant that is less than approximately 3.9.
 5. The method of claim 1, wherein said forming of said conductive plates comprises simultaneously forming each of said conductive plates by patterning multiple parallel horizontal electrodes in successive metal levels such that said horizontal electrodes are aligned, separated by said dielectric material, and connected by vias.
 6. A method of forming a capacitor, said method comprising: forming, above a substrate, a layer comprising a first portion and two second portions on opposite sides of said first portion; forming above said second portions two parallel nodes; forming a plurality of vertical conductive plates above said first portion such that said conductive plates are alternately connected at connecting points to one of said two parallel nodes and such that said conductive plates are separated by spaces that are filled with a dielectric material; reducing a size of said spaces such that a first spacing between said connecting points of adjacent conductive plates is greater than a second spacing between main bodies of said adjacent conductive plates; after said forming of said conductive plates, etching said dielectric material from said spaces and etching said first portion from below said conductive plates so that air gaps are formed in said spaces between said conductive plates and so that each of said conductive plates are supported only at said connecting points; and collapsing said conductive plates in on said air gaps.
 7. The method of claim 6, wherein said collapsing comprises at least one of the following: before said etching of said first portion, depositing a stressed nitride layer at an angle onto said conductive plates such that said stressed nitride layer is thicker on one side of said conductive plates; before said etching of said first portion, forming sidewall spacers on said conductive plates and performing a directional etch so that one sidewall spacer is thicker than another sidewall spacer on each of said conductive plates; and after said etching of said first portion, performing a wet rinse and dry process.
 8. The method of claim 6, wherein said dielectric material has a dielectric constant that is less than approximately 3.9.
 9. The method of claim 6, wherein said forming of said conductive plates comprises simultaneously forming each of said conductive plates by patterning multiple parallel horizontal electrodes in successive metal levels such that said horizontal electrodes are aligned, separated by said dielectric material, and connected by vias.
 10. The method of claim 6, further comprising, after said reducing, depositing over said conductive plates a second dielectric material that has a different dielectric constant than said first dielectric material.
 11. A method of forming a capacitor, said method comprising: forming, above a substrate, a layer comprising a first portion and two second portions on opposite sides of said first portion; forming above said second portions two parallel nodes; forming a plurality of vertical conductive plates above said first portion such that said conductive plates are alternately connected at connecting points to one of said two parallel nodes and such that main bodies of said conductive plates are separated by spaces that are filled with a dielectric material; and after said forming of said conductive plates, masking said nodes and said connecting points such that said main bodies of said conductive plates are exposed; and causing said main bodies of said conductive plates to move closer together in order to narrow said spaces, said masking ensuring that said conductive plates remain connected to said nodes at said connecting points; further comprising, after said size of said spaces is reduced, depositing over said conductive plates a second dielectric material that has a different dielectric constant than said first dielectric material.
 12. The method of claim 11, said reducing comprising: after said masking, etching said dielectric material from said spaces and etching said first portion from below said conductive plates so that air gaps are formed in said spaces between said conductive plates and so that each of said conductive plates are supported only at said connecting points; and collapsing said conductive plates in on said air gaps.
 13. The method of claim 11, said collapsing comprising at least one of the following: before said etching of said first portion, depositing a stressed nitride layer at an angle onto said conductive plates such that said stressed nitride layer is thicker on one side of said conductive plates; before said etching of said first portion, forming sidewall spacers on said conductive plates and performing a directional etch so that one sidewall spacer is thicker than another sidewall spacer on each of said conductive plates; and after said etching of said first portion, performing a wet rinse and dry process. 